overview structuring
typical examples of fabricated devices
Diamond structuring
Fraunhofer IAF
Qu-Pilot
IAF offers cleanroom processing for manufacturing diamond-based micro and nanostructures. Conventional ICP etching can be used to realize for example single pillars, arrays of mesas or pits in diamond. Three-dimensional suspended resonators and waveguides are fabricated by either Faraday Cage angled etching (FCAE) or quasi-isotropic etching.
Sensing Computing Communication
5
Diamond 
Fabrication