Flip-chip bonded module
Flip-chip bonded module fabricated at VTT
Qubit-compatible In flip-chip bonding
VTT-Technical Research Centre of Finland Ltd
Qu-Pilot
This process is suitable for fabrication of indium bumps for flip chip bonding of superconducting qubits or other circuits requiring a similarly high degree of coherence. Resonator quality factors in the range of 1M and qubit coherence times in the range of one hundred microseconds have been measured in modules that have undergone this process. Flip chip bonding is also included in this service. Under-bump metallization is to be agreed upon on case-by-case basis, depending on other metallization used on the chips. Specifications: Standard top chip sizes: 8 mm x 8 mm, 10 mm x 10 mm, 12 mm x 12 mm (others on case-by-case basis) Standard substrate chip sizes: 10 mm x 10 mm, 14 mm x 14 mm, 20 mm x 20 mm (others on case-by-case basis) Max. chip-to-chip distance: 5 µm Keep-out diameter around bumps: 50 µm
In bump
Indium bump on top of a titanium nitride strip, fabricated at VTT.
Sensing Computing Communication
6
Superconducting 
Prototyping  Fabrication