Small contact openings
Samall contact opening as test structures for quantum manufacturing
Contact test structures for quantum manufacturing
The requirements for contact hole patterning in the manufacturing of semiconductor quantum devices are very stringent, especially when it is needed to contact an array of high density of electrodes. We offer the possibility to deliver test structures designed specifically to test new advances in contact patterning for qubit manufacturing, primarily aimed at process equipment companies. The pilot line for fabrication of semiconductor quantum devices can deliver test structures designed on purpose to characterize litho, etching and metallization processes. Characterization facilities at the pilot line can be used to benchmark the results.
Contacting nanometer scale gates
Scheme of test structures for contacting small gates
Sensing Computing
Prototyping  Fabrication