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Superconducting Electrodes in CoSi2
Organization name
CEA
Service
Qu-Pilot
Description
This service is suitable for the fabrication of superconducting electrodes for superconducting Qbit Chips (Gate and or source and drain). Silicides have good electrical transparency with Silicon and some of them are superconduting such as Co disilicide. Thanks to this property, it allows quantum transport across the channel. CEA made superconducting electrodes using an optimized self-aligned silicide process in CoSi2 on 300mm platform (FD-SOI based silicon CMOS).
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Applications
Computing
TRL
4
Platform
Superconducting
Offering type
Prototyping
Fabrication
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