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Single layer metal patterning for BEOL
Organization name
CEA
Service
Qu-Pilot
Description
This service is suitable for the fabrication of a superconducting metal line in 300mm for superconducting Qbit or spin Qbit using materials commonly used in silicon technology as TiN or TaN. Basic Specifications : wafer size : 300mm, Metal line width>100nm, integration: substractive etch
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Document 1
Document 2
Applications
Computing
TRL
4
Platform
Semiconducting
Superconducting
Offering type
Prototyping
Fabrication
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