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CMOS compatible qubit electrodes
Organization name
Fraunhofer Institute for Photonic Microsystems IPMS
Service
Qu-Pilot
Description
The processing flow is dedicated to serve as a flexible CMOS compatible platform for design, process, material and consumable evaluation on scaled superconducting test devices e.g. resonators, capacitors, co-planar waveguides or high kinetic inductance elements. IPMS has established a reliable processing sequence on 300mm industry standard equipment to produce high quality devices with high yield which can serve as a testbed or as prototype vehicle.Wafer size: 200mm, 300mm, Min. CD: ≥ 50nm, LER at min CD: 3nm, Slit width: ≥ 50nm, SC thickness range:
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Document 1
Document 2
Applications
Computing
TRL
4
Platform
Semiconducting
Superconducting
Offering type
Prototyping
Fabrication
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