This process is suitable for the fabrication of superconducting NbTiN films, coplanar waveguides, artificial transmission lines and microwave resonators, which exhibit a high sheet resistivity and consequently a high and non-linear kinetic inductance. FBK has experience and high control on the deposition and patterning of NbTiN films, yielding well-controlled and highly reproducible film thicknesses and sheet resistances. Specifications: Standard chip sizes: 5.0 mm x 5.0 mm, 10 mm x 2.5 mm, 10 mm x 5.0 mm, 10 mm x 10 mm, 20 mm x 10 mm (others on case-by-case basis) Non-metallised area at chip perimeter: ≥ 50 µm Metallisation line width: ≥ 1.0 µm Slit width: ≥ 1.0 µm Metallisation line width reproducibility: ± 0.075 µm Metallisation sheet resistance (at room temperature): e.g. 65 Ω/sq