This process is suitable for fabrication of superconducting Nb resonators intended for possible use in control or readout of spin qubits. Subtractively etched single layer Nb is patterned at imec on 300mm wafers for superconducting applications and the process can be tuned for spin qubits. Target dimensions can vary from 100s of nm to many microns with film thicknesses in the range of 100nm.